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An Optimisation Scheme of Electrostatic Micromotors based on an Equivalent Circuit - Finite Element Approach

Firstly, the equivalent model of a variable capacitance micromotor (VCM) is set up . As input data it uses the energy values obtained from a finite element analysis. Secondly, the automated generation of the finite element model with variable parameters is discussed, in order to analyse a range of geometries. Within this range, optimisation of the parameters with respect to average torque and torque ripple is explained. Results for some motor configurations are given.
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